- 专利标题: Optical component, comprising a material with a predetermined homogeneity of thermal expansion
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申请号: US11016059申请日: 2004-12-17
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公开(公告)号: US07524072B2公开(公告)日: 2009-04-28
- 发明人: Timo Laufer , Johannes Zellner
- 申请人: Timo Laufer , Johannes Zellner
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: DE Oberkochen
- 代理机构: Ohlandt, Greeley, Ruggiero & Perle, L.L.P.
- 优先权: DE10359102 20031217
- 主分类号: G02B5/08
- IPC分类号: G02B5/08 ; G02B1/00
摘要:
There is provided an optical component. The optical component includes a material having a coefficient of thermal expansion α, where the coefficient of thermal expansion is dependent on location. The following applies to the location-dependent coefficient of thermal expansion: α= α±Δα, with Δα being the maximum deviation of the coefficient of thermal expansion from the mean value of the coefficient of thermal expansion α of the material. The following homogeneity condition applies to the material: Δα ≤ ( 0.14 + 0.1 · x + 390 x ) · ɛ _ Q . with the progress of the lacation-dependent progress of the coefficient of thermal expansion being periodical with a wavelength x given in mm, and the thermal output which is absorbed by the optical component being designated by Q given in watts (W), the resulting emissivity being designated by ε, and |Δα|in units of ppb K .
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