发明授权
US07524736B2 Process for manufacturing wafers usable in the semiconductor industry
有权
用于制造可用于半导体工业的晶圆的工艺
- 专利标题: Process for manufacturing wafers usable in the semiconductor industry
- 专利标题(中): 用于制造可用于半导体工业的晶圆的工艺
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申请号: US11607802申请日: 2006-12-01
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公开(公告)号: US07524736B2公开(公告)日: 2009-04-28
- 发明人: Giampiero Ottaviani , Federico Corni , Paolo Ferrari , Flavio Francesco Villa
- 申请人: Giampiero Ottaviani , Federico Corni , Paolo Ferrari , Flavio Francesco Villa
- 申请人地址: IT Agrate Brianza
- 专利权人: STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics S.r.l.
- 当前专利权人地址: IT Agrate Brianza
- 代理机构: Wolf, Greenfield & Saks, P.C.
- 代理商 Lisa K. Jorgenson; James H. Morris
- 优先权: EP05425885 20051214
- 主分类号: H01L21/30
- IPC分类号: H01L21/30 ; C03C15/00
摘要:
To manufacture a layer of semiconductor material, a first wafer of semiconductor material is subjected to implantation to form a defect layer at a distance from a first face; the first wafer is bonded to a second wafer, by putting an insulating layer present on the second wafer in contact with the first face of the first wafer. Then, hydrogen atoms are introduced into the first wafer through a second face at an energy such as to avoid defects to be generated in the first wafer and at a temperature lower than 600° C. Thereby, the first wafer splits into a usable layer, bonded to the second wafer, and a remaining layer disposed between the defect layer and the second face of the first wafer. Prior to bonding, the first wafer is subjected to processing steps for obtaining integrated components.
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