发明授权
US07525162B2 Orientation-optimized PFETS in CMOS devices employing dual stress liners
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采用双重应力衬垫的CMOS器件中的取向优化PFETS
- 专利标题: Orientation-optimized PFETS in CMOS devices employing dual stress liners
- 专利标题(中): 采用双重应力衬垫的CMOS器件中的取向优化PFETS
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申请号: US11850933申请日: 2007-09-06
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公开(公告)号: US07525162B2公开(公告)日: 2009-04-28
- 发明人: Haizhou Yin , Katherine L. Saenger , Chun-Yung Sung , Kai Xiu
- 申请人: Haizhou Yin , Katherine L. Saenger , Chun-Yung Sung , Kai Xiu
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Robert M. Trepp, Esq.
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A PFET is provided on a silicon layer having a (110) surface orientation and located in a substrate. A compressive stress liner disposed on the gate and source/drain regions of the PFET generates a primary longitudinal compressive strain along the direction of the PFET channel. A tensile stress liner disposed on at least one NFET located transversely adjacent to the PFET generates a primary longitudinal tensile strain along the direction of the NFET channel. A secondary stress field from the at least one NFET tensile liner generates a beneficial transverse tensile stress in the PFET channel. The net benefits of the primary compressive longitudinal strain and the secondary tensile transverse stress are maximized when the azimuthal angle between the direction of the PFET channel and an in-plane [1 1 0] crystallographic direction in the (110) silicon layer is from about 25° to about 55.
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