发明授权
US07530279B2 Sampler for sampling charged particles, and apparatus for measuring charge distribution of the charged particles
失效
用于取样带电粒子的取样器，以及用于测量带电粒子电荷分布的装置
- 专利标题： Sampler for sampling charged particles, and apparatus for measuring charge distribution of the charged particles
- 专利标题（中）： 用于取样带电粒子的取样器，以及用于测量带电粒子电荷分布的装置
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申请号： US11439413申请日： 2006-05-22
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公开(公告)号： US07530279B2公开(公告)日： 2009-05-12
- 发明人: Tadashi Iwamatsu , Hiroaki Masuda , Shuji Matsusaka
- 申请人： Tadashi Iwamatsu , Hiroaki Masuda , Shuji Matsusaka
- 申请人地址： JP Osaka
- 专利权人： Sharp Kabushiki Kaisha
- 当前专利权人： Sharp Kabushiki Kaisha
- 当前专利权人地址： JP Osaka
- 代理机构： Edwards Angell Palmer & Dodge LLP
- 代理商 David G. Conlin; Peter J. Mamus
- 优先权： JPP2005-149567 20050523
- 主分类号： G01N1/00
- IPC分类号： G01N1/00
摘要：
A sampler introduces charged particles to be measured into an measuring apparatus for measuring charge distribution of the charged particles. The measuring apparatus has a main body, a guide member, and an electric field curtain generating section. The main body has a first opening at upper side and a second opening at lower side, the first opening being adapted to receive the charged particles, the second opening being adapted to discharge the charged particles. The guide member defines a path of the charged particles, the path extending vertically from the first opening to the second opening. The electric field curtain generating section generates an electric field curtain adjacent to a guide surface of the guide member.
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