发明授权
- 专利标题: Flip chip mounting method and method for connecting substrates
- 专利标题(中): 倒装芯片安装方法及连接基板的方法
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申请号: US11887331申请日: 2006-03-16
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公开(公告)号: US07531385B1公开(公告)日: 2009-05-12
- 发明人: Seiji Karashima , Takashi Kitae , Seiichi Nakatani
- 申请人: Seiji Karashima , Takashi Kitae , Seiichi Nakatani
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2005-094233 20050329
- 国际申请: PCT/JP2006/305274 WO 20060316
- 国际公布: WO2006/103949 WO 20061005
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L23/48 ; H01L23/52 ; H01L29/40
摘要:
A flip chip mounting method which is applicable to the flip chip mounting of a next-generation LSI and high in productivity and reliability as well as a method for connecting substrates are provided. A circuit board 10 having a plurality of connecting terminals 11 and a semiconductor chip 20 having a plurality of electrode terminals 21 are disposed in mutually facing relation and a resin 13 containing conductive particles 12 and a gas bubble generating agent is supplied into the space therebetween. In this state, the resin 13 is heated to generate gas bubbles 30 from the gas bubble generating agent contained in the resin 13. The resin 13 is pushed toward the outside of the generated gas bubbles 30 by the growth thereof. The resin 13 pushed to the outside is self-assembled in the form of columns between the respective terminals of the circuit board 10 and the semiconductor chip 20. In this state, by pressing the semiconductor chip 20 against the circuit board 10, the conductive particles 12 contained in the resin 13 self-assembled between the facing terminals are brought into contact with each other to provide electrical connection between the terminals.
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