Invention Grant
- Patent Title: Beam measuring equipment and beam measuring method using the same
- Patent Title (中): 光束测量设备和光束测量方法使用相同
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Application No.: US10597838Application Date: 2005-02-10
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Publication No.: US07535220B2Publication Date: 2009-05-19
- Inventor: Yuichiro Sasaki , Tamaki Watanabe , Takeo Kawaguchi , Shinichi Watanabe , Takeshi Katayama , Bunji Mizuno , Hisataka Kanada
- Applicant: Yuichiro Sasaki , Tamaki Watanabe , Takeo Kawaguchi , Shinichi Watanabe , Takeshi Katayama , Bunji Mizuno , Hisataka Kanada
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Pearne & Gordon LLP
- Priority: JP2004-033714 20040210
- International Application: PCT/JP2005/002075 WO 20050210
- International Announcement: WO2005/076039 WO 20050818
- Main IPC: G01R33/035
- IPC: G01R33/035

Abstract:
A measuring device includes a magnetic shielding part for shielding an outer magnetic field, and a plurality of magnetic field sensors which are arranged in a shielding space which is formed by the magnetic shielding part, wherein the magnetic field sensor includes a plurality of magnetic field collection mechanisms which collect magnetic fields which the beam current to be measured generates, and the magnetic field collection mechanism is a cylindrical structural body which has at least a surface thereof formed of a superconductive body and includes a bridge portion which has only a portion thereof formed of a superconductive body on an outer peripheral portion thereof, and a magnetic field which the beam current to be measured generates is measured by the magnetic field sensors. Due to the arrangement of the plurality of magnetic field sensors, a beam position and a beam current can be detected.
Public/Granted literature
- US20080024126A1 Beam Measuring Equipment and Beam Measuring Method Using the Same Public/Granted day:2008-01-31
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