发明授权
- 专利标题: Beam measuring equipment and beam measuring method using the same
- 专利标题(中): 光束测量设备和光束测量方法使用相同
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申请号: US10597838申请日: 2005-02-10
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公开(公告)号: US07535220B2公开(公告)日: 2009-05-19
- 发明人: Yuichiro Sasaki , Tamaki Watanabe , Takeo Kawaguchi , Shinichi Watanabe , Takeshi Katayama , Bunji Mizuno , Hisataka Kanada
- 申请人: Yuichiro Sasaki , Tamaki Watanabe , Takeo Kawaguchi , Shinichi Watanabe , Takeshi Katayama , Bunji Mizuno , Hisataka Kanada
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: Pearne & Gordon LLP
- 优先权: JP2004-033714 20040210
- 国际申请: PCT/JP2005/002075 WO 20050210
- 国际公布: WO2005/076039 WO 20050818
- 主分类号: G01R33/035
- IPC分类号: G01R33/035
摘要:
A measuring device includes a magnetic shielding part for shielding an outer magnetic field, and a plurality of magnetic field sensors which are arranged in a shielding space which is formed by the magnetic shielding part, wherein the magnetic field sensor includes a plurality of magnetic field collection mechanisms which collect magnetic fields which the beam current to be measured generates, and the magnetic field collection mechanism is a cylindrical structural body which has at least a surface thereof formed of a superconductive body and includes a bridge portion which has only a portion thereof formed of a superconductive body on an outer peripheral portion thereof, and a magnetic field which the beam current to be measured generates is measured by the magnetic field sensors. Due to the arrangement of the plurality of magnetic field sensors, a beam position and a beam current can be detected.
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