发明授权
US07538636B2 Electronic part with a comb electrode and protective film and electronic equipment including same 有权
具有梳状电极和保护膜的电子部件及包括其的电子设备

Electronic part with a comb electrode and protective film and electronic equipment including same
摘要:
An electronic part, object of which is to improve temperature characteristics and electrical properties, includes a substrate (1), a comb-type electrode (2) that is disposed on the upper surface of the substrate (1), and a protective film (4) that covers the comb-type electrode (2) and has an uneven shape at its top surface. If the pitch width of one pitch in the uneven shape of the protective film (4) is L, the width of one pitch of a convex portion (4a) of the unevenness in the uneven shape of the protective film (4) is L1, the width of one pitch of a concave portion (4b) thereof is L2, the pitch width of one pitch of the comb-type electrode (2) is p, the width of one of electrode fingers which form the comb-type electrode (2) is p1 and the width between the electrode fingers is p2, then each parameter is set so that the following expressions are satisfied, L1≦p1and L2≧p2(herein, the correlations of L≈p, p1+p2=p and L1+L2=L are satisfied).
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