发明授权
- 专利标题： Electromagnetic radiation detecting apparatus, radiation detecting apparatus, radiation detecting system and laser processing method
- 专利标题（中）： 电磁辐射检测装置，放射线检测装置，放射线检测系统及激光加工方法
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申请号： US11449621申请日： 2006-06-09
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公开(公告)号： US07541595B2公开(公告)日： 2009-06-02
- 发明人: Tomoyuki Yagi , Tadao Endo , Toshio Kameshima , Katsuro Takenaka , Keigo Yokoyama
- 申请人： Tomoyuki Yagi , Tadao Endo , Toshio Kameshima , Katsuro Takenaka , Keigo Yokoyama
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： Fitzpatrick, Cella, Harper & Scinto
- 优先权： JP2005-172466 20050613; JP2006-151865 20060531
- 主分类号： G01T1/20
- IPC分类号： G01T1/20
摘要：
As to an electromagnetic radiation detecting apparatus, a radiation detecting apparatus, a radiation detecting system and a laser processing method, a TFT is disposed on an insulating substrate. A conversion element converting electromagnetic radiation into an electric signal is disposed over the TFT. A member for marking the position of the switching element is disposed on the conversion element. The position of a switching element having a defect can be located by means of the member on the conversion element. By radiating laser light to be focused on the member, it becomes possible to perform repair accurately.