Invention Grant
- Patent Title: Creating a virtual profile library
- Patent Title (中): 创建虚拟配置文件库
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Application No.: US11394859Application Date: 2006-03-31
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Publication No.: US07542859B2Publication Date: 2009-06-02
- Inventor: Merritt Funk , Daniel J. Prager
- Applicant: Merritt Funk , Daniel J. Prager
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Ltd.
- Current Assignee: Tokyo Electron Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Morrison & Foerstar LLP
- Main IPC: G01R13/00
- IPC: G01R13/00

Abstract:
A method of creating a virtual profile library includes obtaining a reference signal. The reference signal is compared to a plurality of signals in a first library. The reference signal is compared to a plurality of signals in a second library. A virtual profile data space is created when first and second matching criteria are not met. The virtual profile data space is created using differences between a profile data spaces associated with the first and second libraries. A first virtual profile signal is created in the virtual profile data space. A difference is calculated between the reference signal and the first virtual profile signal. The difference is compared to a virtual profile library creation criteria. If the virtual profile library creation criteria is met, the first virtual profile signal and the virtual profile data, associated with the first virtual profile signal is stored.
Public/Granted literature
- US20070239369A1 Creating a virtual profile library Public/Granted day:2007-10-11
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