Invention Grant
- Patent Title: Compact pressure-sensing device
- Patent Title (中): 紧凑型压力传感器
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Application No.: US11401692Application Date: 2006-04-10
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Publication No.: US07543502B2Publication Date: 2009-06-09
- Inventor: Trevor Graham Edward Niblock
- Applicant: Trevor Graham Edward Niblock
- Applicant Address: US CA Sunnyvale
- Assignee: Analatom Incorporated
- Current Assignee: Analatom Incorporated
- Current Assignee Address: US CA Sunnyvale
- Agency: DLA Piper LLP (US)
- Main IPC: G01L9/06
- IPC: G01L9/06

Abstract:
The invention is a compact sensing device that is capable of measuring the conditions (e,g, pressure, temperature) inside a cylinder of an internal combustion engine. The invention is also a cost-effective method of fabricating the sensing device. The sensing device includes a substrate, a beam, and piezo-resistive sensing elements. The beam, which is formed on the substrate, is capable of deflecting according to different pressures applied to different beam surfaces. The piezo-resistive sensing elements are coupled to the beam and detect beam deflection. The piezo-resistive sensing elements generate an electrical signal corresponding to the beam deflection.
Public/Granted literature
- US20070016384A1 Compact pressure-sensing device Public/Granted day:2007-01-18
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