Invention Grant
- Patent Title: Method for fabricating thin film pattern and method for fabricating flat panel display device using the same
- Patent Title (中): 制造薄膜图案的方法和使用该方法制造平板显示装置的方法
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Application No.: US11494632Application Date: 2006-07-28
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Publication No.: US07544069B2Publication Date: 2009-06-09
- Inventor: Jin Wuk Kim
- Applicant: Jin Wuk Kim
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: McKenna Long & Aldridge LLP
- Priority: KR10-2005-0129702 20051226
- Main IPC: H01L51/40
- IPC: H01L51/40 ; H01L21/00 ; H01L21/31 ; H01L21/469

Abstract:
A method for fabricating a thin film pattern and a method for fabricating a flat panel display device using the same to form an organic material pattern by not using a photo process are disclosed. The method for fabricating the thin film pattern includes forming a first conductive thin film pattern on a substrate; forming a master mold provided with a second thin film pattern; coating an organic material on the master mold provided with the second thin film pattern; joining the substrate and the master mold to contact the first thin film pattern and a surface of the substrate with the organic material; hardening the organic material; separating the substrate and the master mold from each other to provide an organic thin film pattern having step coverage formed by the second thin film pattern on a substrate provided with the first thin film pattern.
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