Invention Grant
- Patent Title: Method of fabricating nanodevices
- Patent Title (中): 制造纳米器件的方法
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Application No.: US11364800Application Date: 2006-02-28
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Publication No.: US07544523B2Publication Date: 2009-06-09
- Inventor: Gregory Schwind , Gerald Magera , Lawrence Scipioni
- Applicant: Gregory Schwind , Gerald Magera , Lawrence Scipioni
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Griner, LLP
- Agent David Griner; Michael O. Scheinberg
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
A method of batch fabrication using established photolithographic techniques allowing nanoparticles or nanodevices to be fabricated and mounted into a macroscopic device in a repeatable, reliable manner suitable for large-scale mass production. Nanoparticles can be grown on macroscopic “modules” which can be easily manipulated and shaped to fit standard mounts in various devices.
Public/Granted literature
- US20070148991A1 Method of fabricating nanodevices Public/Granted day:2007-06-28
Information query
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