Invention Grant
- Patent Title: Wafer laser processing method
- Patent Title (中): 晶圆激光加工方法
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Application No.: US11892914Application Date: 2007-08-28
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Publication No.: US07544590B2Publication Date: 2009-06-09
- Inventor: Yosuke Watanabe
- Applicant: Yosuke Watanabe
- Applicant Address: JP Tokyo
- Assignee: Disco Corporation
- Current Assignee: Disco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2006-232642 20060829
- Main IPC: H01L21/268
- IPC: H01L21/268

Abstract:
A method of carrying out laser processing on a wafer having a plurality of parallel streets on the front surface along the streets, comprising the steps of: carrying out a first laser processing step of carrying out laser processing along streets formed in one half area of the wafer by carrying out a laser beam application step for applying a laser beam along the streets by positioning the outermost street on one side in the indexing-feed direction of the wafer right below a condenser and an indexing-feed step for positioning a street adjacent to the street which has undergone the laser beam application step on the wafer right below the condenser sequentially; and carrying out a second laser processing step of carrying out laser processing along streets formed in the other half area of the wafer by carrying out a laser beam application step for applying a laser beam along the streets by positioning the outermost street on the other side in the indexing-feed direction of the wafer which has undergone the first laser processing step right below the condenser and an indexing-feed step for positioning a street adjacent to the street which has undergone the laser beam application step on the wafer right below the condenser sequentially.
Public/Granted literature
- US20080057680A1 Wafer laser processing method Public/Granted day:2008-03-06
Information query
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