发明授权
US07545423B2 Image sensor having a passivation layer exposing at least a main pixel array region and methods of fabricating the same 有权
具有暴露至少主像素阵列区域的钝化层的图像传感器及其制造方法

Image sensor having a passivation layer exposing at least a main pixel array region and methods of fabricating the same
摘要:
A CMOS image sensor with improved sensitivity includes a main pixel array region of an active pixel array region formed on a semiconductor substrate. A passivation layer is formed over the sensor, and it is at least partially removed from the main pixel array region, such that incident light being detected by the main pixel array does not pass through the passivation layer. Optical absorption and refraction caused by the material of the passivation layer are eliminated, resulting in an image sensor with improved optical sensitivity.
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