发明授权
- 专利标题: Apparatus and method for providing high intensity non-coherent light and for speckle reduction
- 专利标题(中): 用于提供高强度非相干光并减少斑点的装置和方法
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申请号: US11702106申请日: 2007-02-05
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公开(公告)号: US07547873B2公开(公告)日: 2009-06-16
- 发明人: Noam Babayoff , Yossef Atiya , Tzvi Philipp
- 申请人: Noam Babayoff , Yossef Atiya , Tzvi Philipp
- 申请人地址: IL Or Yehuda
- 专利权人: Cadent Ltd.
- 当前专利权人: Cadent Ltd.
- 当前专利权人地址: IL Or Yehuda
- 代理机构: The Nath Law Group
- 代理商 Jerald L. Meyer; Derek Richmond
- 主分类号: H01J3/14
- IPC分类号: H01J3/14
摘要:
An apparatus is adapted for confocal imaging of a non-flat specimen, and includes a light source for producing a light beam, imaging optics adapted to focus the light beam into at least one spot on a surface of a specimen, and a detector adapted to receive and detect light reflected from the specimen surface. The light source includes an optical system for converting a coherent beam into a plurality of beams, each of which is modified by a moving diffuser within a range of movement that is correlated to the detector's integration time.
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