发明授权
- 专利标题: Coupled resonator filter and fabrication method thereof
- 专利标题(中): 耦合谐振滤波器及其制造方法
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申请号: US11455190申请日: 2006-06-19
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公开(公告)号: US07548139B2公开(公告)日: 2009-06-16
- 发明人: Hao-seok Park , Joo-ho Lee , Byeoung-ju Ha , Seog-woo Hong , Hyung Choi , In-sang Song
- 申请人: Hao-seok Park , Joo-ho Lee , Byeoung-ju Ha , Seog-woo Hong , Hyung Choi , In-sang Song
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Sughrue Mion, PLLC
- 优先权: KR10-2005-0125525 20051219
- 主分类号: H03H9/17
- IPC分类号: H03H9/17 ; H03H9/00
摘要:
A coupled resonator filter and a method of fabricating the coupled resonator filter are provided. The method includes: sequentially stacking a first electrode, a first piezoelectric layer, a second electrode, an insulating layer, a third electrode, a second piezoelectric layer, and a fourth electrode on a surface of a substrate; sequentially patterning the first electrode, the first piezoelectric layer, the second electrode, the insulating layer, the third electrode, the second piezoelectric layer, and the fourth electrode to expose areas of the first, second, and third electrodes; forming a plurality of connection electrodes respectively connected to the exposed areas of the first, second, and third electrodes and an area of the fourth electrode; and etching an area of the substrate underneath the first electrode to form an air gap.
公开/授权文献
- US20070139139A1 Coupled resonator filter and fabrication method thereof 公开/授权日:2007-06-21
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