发明授权
US07548205B2 Wafer scale antenna module with a backside connectivity 有权
具有背面连接的晶圆天线模块

  • 专利标题: Wafer scale antenna module with a backside connectivity
  • 专利标题(中): 具有背面连接的晶圆天线模块
  • 申请号: US11384589
    申请日: 2006-03-20
  • 公开(公告)号: US07548205B2
    公开(公告)日: 2009-06-16
  • 发明人: Farrokh Mohamadi
  • 申请人: Farrokh Mohamadi
  • 代理机构: Haynes & Boone, LLP.
  • 主分类号: H01Q1/38
  • IPC分类号: H01Q1/38
Wafer scale antenna module with a backside connectivity
摘要:
In one embodiment, wafer-scale antenna module is provided that includes: a substrate having a first surface and an opposing second surface; a plurality of conductive contact regions extending from the first surface into the substrate towards the second surface; active circuitry formed in the substrate adjacent the second surface, the active circuitry electrically coupled to the conductive contact regions; an insulating layer adjacent the first surface, the insulating layer forming a plurality of vias arranged corresponding to the plurality of conductive contact regions, each via forming an opening at the corresponding conductive contact region; and a plurality of antennas formed on the insulating layer corresponding to the plurality of vias; wherein each via contains an electrical conductor to electrically couple the corresponding contact region to the antenna corresponding to the via, whereby a resulting separation between the driving circuitry and the antennas aids an electrical isolation of the driving circuitry from the antennas.
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