发明授权
- 专利标题: Method for bonding slider row bars for photolithography process
- 专利标题(中): 粘合滑块排条的光刻工艺方法
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申请号: US11514250申请日: 2006-09-01
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公开(公告)号: US07549214B2公开(公告)日: 2009-06-23
- 发明人: TaiBoon Lee , ZiAn Wang , YongPing Gao , ZhenHua Liu
- 申请人: TaiBoon Lee , ZiAn Wang , YongPing Gao , ZhenHua Liu
- 申请人地址: CN Hong Kong
- 专利权人: SAE Magnetics (H.K.) Ltd.
- 当前专利权人: SAE Magnetics (H.K.) Ltd.
- 当前专利权人地址: CN Hong Kong
- 代理机构: Nixon & Vanderhye P.C.
- 主分类号: G11B5/127
- IPC分类号: G11B5/127 ; H04R31/00
摘要:
Certain example embodiments relate to a method for bonding slider row bars for a photolithography process. A holding device having a sticky surface is formed. A plurality of slider row bars is provided, with each having a first surface for forming an air bearing surface and a second surface opposite the first surface. The slider row bars are secured to the holding device with their first surfaces facing the sticky surface so that the first surfaces of the slider row bars are aligned each other. The slider row bars are bonded together by an encapsulating glue. A carrier is provided, and the carrier is bonded to the second surfaces of the slider row bars. The holding device is removed. The example embodiments also can be used to manufacture sliders.
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