发明授权
- 专利标题: Coversion apparatus and imaging system
- 专利标题(中): 转换装置和成像系统
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申请号: US11750719申请日: 2007-05-18
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公开(公告)号: US07550731B2公开(公告)日: 2009-06-23
- 发明人: Minoru Watanabe , Chiori Mochizuki , Takamasa Ishii
- 申请人: Minoru Watanabe , Chiori Mochizuki , Takamasa Ishii
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2006-161641 20060609
- 主分类号: G01T1/24
- IPC分类号: G01T1/24 ; H01L27/146
摘要:
A conversion apparatus includes a pixel region, on a substrate, including a plurality of pixels arranged in a matrix, with each pixel having a conversion element that converts radiation into electric charges, and a switching element. The switching element has a structure having a gate electrode, a first insulating layer, a second insulating layer, and a semiconductor layer from the substrate side in this order. The conversion element has an MIS-type structure of a bottom electrode arranged on an insulating layer extending from the first insulating layer of the switching element and being vertically higher than the gate electrode of the switching element, an insulating layer which is formed of the same layer as the second insulating layer of the switching element, and a semiconductor layer which is formed of the same layer as the semiconductor layer of the switching element from the substrate side in this order.
公开/授权文献
- US20070295966A1 CONVERSION APPARATUS AND IMAGING SYSTEM 公开/授权日:2007-12-27