发明授权
- 专利标题： Method for driving micro-oscillating element having comb-teeth electrodes
- 专利标题（中）： 驱动具有梳齿电极的微振动元件的方法
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申请号： US11603006申请日： 2006-11-22
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公开(公告)号： US07550895B2公开(公告)日： 2009-06-23
- 发明人: Osamu Tsuboi , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Mi Xiaoyu , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
- 申请人： Osamu Tsuboi , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Mi Xiaoyu , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
- 申请人地址： JP Kawasaki
- 专利权人： Fujitsu Limited
- 当前专利权人： Fujitsu Limited
- 当前专利权人地址： JP Kawasaki
- 代理机构： Kratz, Quintos & Hanson, LLP.
- 优先权： JP2003-292554 20030812; JP2004-001440 20040106
- 主分类号： H02N1/00
- IPC分类号： H02N1/00 ; G02B26/08
摘要：
A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.
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