发明授权
- 专利标题: Nanomachined mechanical components using nanoplates, methods of fabricating the same and methods of manufacturing nanomachines
- 专利标题(中): 使用纳米板的纳米机械部件,其制造方法和制造纳米机械的方法
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申请号: US11263476申请日: 2005-10-31
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公开(公告)号: US07557044B2公开(公告)日: 2009-07-07
- 发明人: Yong Ju Yun , Chil Seong Ah , Dong Han Ha , Hyung Ju Park , Wan Soo Yun , Kwang Cheol Lee , Gwang Seo Park
- 申请人: Yong Ju Yun , Chil Seong Ah , Dong Han Ha , Hyung Ju Park , Wan Soo Yun , Kwang Cheol Lee , Gwang Seo Park
- 申请人地址: KR Daejeon
- 专利权人: Korean Research Institute of Standards and Science
- 当前专利权人: Korean Research Institute of Standards and Science
- 当前专利权人地址: KR Daejeon
- 代理机构: DeMont & Breyer LLC
- 优先权: KR10-2005-0011968 20050214
- 主分类号: H01L21/302
- IPC分类号: H01L21/302
摘要:
Disclosed herein is a method of fabricating nano-components using nanoplates, including the steps of: printing a grid on a substrate using photolithography and Electron Beam Lithography; spraying an aqueous solution dispersed with nanoplates onto the grid portion to position the nanoplates on the substrate; depositing a protective film of a predetermined thickness on the substrate and the nanoplates positioned on the substrate; ion-etching the nanoplates deposited with the protective film by using a Focused Ion Beam (FIB) or Electron Beam Lithography; and eliminating the protective film remaining on the substrate using a protective film remover after the ion-etching of the nanoplates, and a method of manufacturing nanomachines or nanostructures by transporting such nano-components using a nano probe and assembling with other nano-components. The present invention makes it possible to fabricate the high-quality nano-components in a more simple and easier manner at a lower cost, as compared to other conventional methods. Further, the present invention provides a method of implementing nanomachines through combination of such nano-components and biomolecules, etc.
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