Invention Grant
US07560942B2 Probe receptacle for mounting a probe for testing semiconductor components, probe holder arm and test apparatus
失效
用于安装用于测试半导体元件,探头支架臂和测试设备的探头的探针插座
- Patent Title: Probe receptacle for mounting a probe for testing semiconductor components, probe holder arm and test apparatus
- Patent Title (中): 用于安装用于测试半导体元件,探头支架臂和测试设备的探头的探针插座
-
Application No.: US11674208Application Date: 2007-02-13
-
Publication No.: US07560942B2Publication Date: 2009-07-14
- Inventor: Hans-Jurgen Fleischer , Axel Schmidt , Stojan Kanev , Axel Becker
- Applicant: Hans-Jurgen Fleischer , Axel Schmidt , Stojan Kanev , Axel Becker
- Applicant Address: DE Sacka
- Assignee: SUSS MicroTec Test Systems GmbH
- Current Assignee: SUSS MicroTec Test Systems GmbH
- Current Assignee Address: DE Sacka
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Priority: DE102006054673 20061117
- Main IPC: G01R1/067
- IPC: G01R1/067

Abstract:
To arrange a probe needle in a reproducible manner, ensure reliable contact-connection of the probe needle and ensure that the probe needle is held securely even at high temperatures or test forces, a probe receptacle is provided for mounting a probe for testing semiconductor components. The probe has a probe needle and an essentially prismatic probe shaft. The probe receptacle comprises a base having a socket opening to receive the prismatic probe shaft, surrounded by a base wall. The base wall comprises at least two base wall segments which can be moved toward one another. A probe holder arm having such a probe receptacle, and test apparatus having at least one probe which has such a probe receptacle are also provided.
Public/Granted literature
Information query