发明授权
US07560942B2 Probe receptacle for mounting a probe for testing semiconductor components, probe holder arm and test apparatus
失效
用于安装用于测试半导体元件,探头支架臂和测试设备的探头的探针插座
- 专利标题: Probe receptacle for mounting a probe for testing semiconductor components, probe holder arm and test apparatus
- 专利标题(中): 用于安装用于测试半导体元件,探头支架臂和测试设备的探头的探针插座
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申请号: US11674208申请日: 2007-02-13
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公开(公告)号: US07560942B2公开(公告)日: 2009-07-14
- 发明人: Hans-Jurgen Fleischer , Axel Schmidt , Stojan Kanev , Axel Becker
- 申请人: Hans-Jurgen Fleischer , Axel Schmidt , Stojan Kanev , Axel Becker
- 申请人地址: DE Sacka
- 专利权人: SUSS MicroTec Test Systems GmbH
- 当前专利权人: SUSS MicroTec Test Systems GmbH
- 当前专利权人地址: DE Sacka
- 代理机构: Heslin Rothenberg Farley & Mesiti P.C.
- 优先权: DE102006054673 20061117
- 主分类号: G01R1/067
- IPC分类号: G01R1/067
摘要:
To arrange a probe needle in a reproducible manner, ensure reliable contact-connection of the probe needle and ensure that the probe needle is held securely even at high temperatures or test forces, a probe receptacle is provided for mounting a probe for testing semiconductor components. The probe has a probe needle and an essentially prismatic probe shaft. The probe receptacle comprises a base having a socket opening to receive the prismatic probe shaft, surrounded by a base wall. The base wall comprises at least two base wall segments which can be moved toward one another. A probe holder arm having such a probe receptacle, and test apparatus having at least one probe which has such a probe receptacle are also provided.
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