发明授权

Optical waveguide, method of manufacturing the same and optical communication module
摘要:
An optical waveguide includes: a lower substrate; a waveguide core that is formed on the lower substrate; a clad that is formed to surround a periphery of the waveguide core; and an upper substrate that is opposed to the lower substrate, wherein the waveguide cores, the lower substrate and the upper substrate surround a cavity extended along the waveguide core.
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