发明授权
US07565633B2 Verifying mask layout printability using simulation with adjustable accuracy
失效
使用可调精度的模拟验证面具布局的可印刷性
- 专利标题: Verifying mask layout printability using simulation with adjustable accuracy
- 专利标题(中): 使用可调精度的模拟验证面具布局的可印刷性
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申请号: US11619320申请日: 2007-01-03
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公开(公告)号: US07565633B2公开(公告)日: 2009-07-21
- 发明人: Maharaj Mukherjee , James A. Culp , Scott M. Mansfield
- 申请人: Maharaj Mukherjee , James A. Culp , Scott M. Mansfield
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Hoffman Warnick LLC
- 代理商 Todd M. C. Li
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
A method, system and computer program product for verifying printability of a mask layout for a photolithographic process are disclosed. A simulation of the photolithographic process for the designed mask layout is simulated using a simplified version of the mask layout with a lower accuracy to generate a lower accuracy simulated image. Where the lower accuracy simulated image is determined as potentially including an error, a further simulation of the designated portion of the mask layout with a higher accuracy will be performed.
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