发明授权
US07565633B2 Verifying mask layout printability using simulation with adjustable accuracy 失效
使用可调精度的模拟验证面具布局的可印刷性

Verifying mask layout printability using simulation with adjustable accuracy
摘要:
A method, system and computer program product for verifying printability of a mask layout for a photolithographic process are disclosed. A simulation of the photolithographic process for the designed mask layout is simulated using a simplified version of the mask layout with a lower accuracy to generate a lower accuracy simulated image. Where the lower accuracy simulated image is determined as potentially including an error, a further simulation of the designated portion of the mask layout with a higher accuracy will be performed.
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