Invention Grant
- Patent Title: Ion source
- Patent Title (中): 离子源
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Application No.: US11780651Application Date: 2007-07-20
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Publication No.: US07569837B2Publication Date: 2009-08-04
- Inventor: Nishino Shigehiro , Ono Ryoichi
- Applicant: Nishino Shigehiro , Ono Ryoichi
- Applicant Address: JP
- Assignee: Kyoto Institute of Technology
- Current Assignee: Kyoto Institute of Technology
- Current Assignee Address: JP
- Agency: Thomas, Kayden, Horstemeyer & Risley, LLP.
- Priority: JPP2005-053762 20050228; WOPCT/JP2006/003567 20060227
- Main IPC: H01J49/10
- IPC: H01J49/10 ; H01J49/12 ; H01J27/02 ; H01J27/22

Abstract:
It is a technical challenge to provide a small-sized ion source excellent in operability.An ion source of the present invention includes: a cylindrical insulation tube (2) opened upward and opened at part of its lower surface; a plurality of hollow cylindrical permanent magnets (3), provided on the outer peripheral surface of the insulation tube to be arranged in a row in the axial direction of the insulation tube; a gas supplying means (34, 35, 20) for supplying gas into the insulation tube; a cathode electrode, at the tip end of which a fitting unit (19) for fitting of a solid material (18) there to is formed; an annular anode electrode (5), which is fitted to an opening in the lower surface of the insulation tube; an upper frame (6), which blocks the upper portion of the insulation tube and suspends the cathode electrode so as to allow the fitting unit to approach the anode electrode; and a lower frame (7), in which an extraction port (37) is formed for extracting ions emitted from the anode electrode, and on which the insulation tube is mounted.
Public/Granted literature
- US20080067411A1 Ion Source Public/Granted day:2008-03-20
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