发明授权
- 专利标题: Vacuum pump
- 专利标题(中): 真空泵
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申请号: US11092898申请日: 2005-03-29
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公开(公告)号: US07572096B2公开(公告)日: 2009-08-11
- 发明人: Manabu Nonaka , Akihiko Wada
- 申请人: Manabu Nonaka , Akihiko Wada
- 申请人地址: JP
- 专利权人: BOC Edwards Japan Limited
- 当前专利权人: BOC Edwards Japan Limited
- 当前专利权人地址: JP
- 代理机构: Adams & Wilks
- 优先权: JP2004-139331 20040510
- 主分类号: F03B11/02
- IPC分类号: F03B11/02
摘要:
A vacuum pump is provided in which gas molecules in a vacuum chamber are sucked and exhausted by the rotational motion of a rotor rotatably supported in a pump case. At least one nickel alloy layer is disposed on a surface of at least one component defining a flow path in the vacuum pump for increasing a resistance of the component to corrosion due to a corrosive effect of a gas flowing through the flowpath. A nickel oxide is formed on a surface of the nickel alloy layer and has a higher emissivity than that of the nickel alloy layer for increasing a quantity of heat radiated from the surface of the component when the component is heated during operation of the vacuum pump.
公开/授权文献
- US20050249618A1 Vacuum pump 公开/授权日:2005-11-10