发明授权
- 专利标题： Magnetic recording medium, method of manufacturing the same, and magnetic recording/reproduction apparatus
- 专利标题（中）： 磁记录介质及其制造方法以及磁记录/再现装置
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申请号： US11135258申请日： 2005-05-24
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公开(公告)号： US07572528B2公开(公告)日： 2009-08-11
- 发明人: Takayuki Yamamoto , Masatoshi Sakurai , Yoshiyuki Kamata
- 申请人： Takayuki Yamamoto , Masatoshi Sakurai , Yoshiyuki Kamata
- 申请人地址： JP Tokyo
- 专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人地址： JP Tokyo
- 代理机构： Pillsbury Winthrop Shaw Pittman, LLP
- 优先权： JP2004-183933 20040622
- 主分类号： G11B5/66
- IPC分类号： G11B5/66 ; G11B5/82 ; G11B23/03
摘要：
A magnetic recording medium is obtained by easily patterning a magnetic recording layer without deteriorating its electromagnetic conversion characteristics, by forming a silicon-based protective film between the magnetic recording layer and a photoresist, and performing dry etching and oxygen plasma processing.