发明授权
- 专利标题: Polarized pulsed front-end beam source for electron microscope
- 专利标题(中): 用于电子显微镜的极化脉冲前端光束源
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申请号: US11625454申请日: 2007-01-22
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公开(公告)号: US07573053B2公开(公告)日: 2009-08-11
- 发明人: John W. Lewellen , John Noonan
- 申请人: John W. Lewellen , John Noonan
- 申请人地址: US IL Chicago
- 专利权人: UChicago Argonne, LLC
- 当前专利权人: UChicago Argonne, LLC
- 当前专利权人地址: US IL Chicago
- 代理商 Joan Pennington
- 主分类号: H01J37/73
- IPC分类号: H01J37/73
摘要:
A method and an electron source are provided for generating polarized electrons for an electron microscope. The electron source includes a photoemissive cathode and a low-power drive laser. The geometry of the photoemissive cathode uses a generally planar emission surface, which is imaged to approximately 1/100 its initial size via electrostatic focusing elements. The virtual emitter, or image spot, then is used as an electron source by a conventional microscope column.
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