Invention Grant
US07578727B2 Conditioner device for conditioning polishing pad and chemical mechanical polishing apparatus including the same 有权
用于调理抛光垫的调节装置和包括其的化学机械抛光装置

Conditioner device for conditioning polishing pad and chemical mechanical polishing apparatus including the same
Abstract:
The present invention relates to a conditioner device for polishing pad and a chemical mechanical polishing (CMP) apparatus having the same. The conditioner device of the present invention comprises a rotable support plate including a support plate surface comprising a center area located about the rotational axis of the support plate, a mid area surrounding the center area, and a peripheral area surrounding the mid area, a plurality of conditioning zones located within a portion of the mid area of the support plate surface. A plurality of hard particles which are densely arranged within the conditioning zones and are attached to the support plate surface. A plurality of passages defined by the conditioning zones within which a slurry flows, the passages occupying a portion of the mid area which is not occupied by the conditioning zones, the center area and the peripheral area.
Information query
Patent Agency Ranking
0/0