Invention Grant
- Patent Title: Conditioner device for conditioning polishing pad and chemical mechanical polishing apparatus including the same
- Patent Title (中): 用于调理抛光垫的调节装置和包括其的化学机械抛光装置
-
Application No.: US11466425Application Date: 2006-08-22
-
Publication No.: US07578727B2Publication Date: 2009-08-25
- Inventor: Sung-Tae Moon , Dong-Jun Lee , Kyoung-Moon Kang , Nam-Soo Kim , Bong-Su Ahn
- Applicant: Sung-Tae Moon , Dong-Jun Lee , Kyoung-Moon Kang , Nam-Soo Kim , Bong-Su Ahn
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Marger Johnson & McCollom, P.C.
- Priority: KR10-2005-0133590 20051229
- Main IPC: B24B53/00
- IPC: B24B53/00

Abstract:
The present invention relates to a conditioner device for polishing pad and a chemical mechanical polishing (CMP) apparatus having the same. The conditioner device of the present invention comprises a rotable support plate including a support plate surface comprising a center area located about the rotational axis of the support plate, a mid area surrounding the center area, and a peripheral area surrounding the mid area, a plurality of conditioning zones located within a portion of the mid area of the support plate surface. A plurality of hard particles which are densely arranged within the conditioning zones and are attached to the support plate surface. A plurality of passages defined by the conditioning zones within which a slurry flows, the passages occupying a portion of the mid area which is not occupied by the conditioning zones, the center area and the peripheral area.
Public/Granted literature
Information query