Invention Grant
US07579123B2 Method for crystallizing amorphous silicon into polysilicon and mask used therefor
有权
将非晶硅结晶成多晶硅的方法和用于其的掩模
- Patent Title: Method for crystallizing amorphous silicon into polysilicon and mask used therefor
- Patent Title (中): 将非晶硅结晶成多晶硅的方法和用于其的掩模
-
Application No.: US11557947Application Date: 2006-11-08
-
Publication No.: US07579123B2Publication Date: 2009-08-25
- Inventor: Fang-Tsun Chu , Yu-Cheng Chen
- Applicant: Fang-Tsun Chu , Yu-Cheng Chen
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW95105364A 20060217
- Main IPC: G03F1/00
- IPC: G03F1/00

Abstract:
A mask for laser-crystallizing amorphous silicon into polysilicon is provided. The mask comprises a transparent substrate having a first block, a second block, and a third block with equal sizes. The second block is located between the first block and the third block. The first block includes a plurality of first transmission regions and a plurality of first opaque regions located between the first transmission regions. The second block includes a plurality of second transmission regions correspond to the first opaque regions and a plurality of second opaque regions located between the second transmission regions and corresponds to the first transmission regions. The third block includes a plurality of third transmission regions arranged corresponding to the centers of the first transmission regions and corresponding to centers of the second transmission regions and a plurality of third opaque regions located between the third transmission regions.
Public/Granted literature
- US20070196743A1 METHOD FOR CRYSTALLIZING AMORPHOUS SILICON INTO POLYSILICON AND MASK USED THEREFOR Public/Granted day:2007-08-23
Information query