Invention Grant
- Patent Title: MEMS digital linear actuator
- Patent Title (中): MEMS数字线性执行器
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Application No.: US11190307Application Date: 2005-07-26
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Publication No.: US07583006B2Publication Date: 2009-09-01
- Inventor: Robert J. Calvet , Roman C. Gutierrez , Darrell Harrington , Tony K. Tang
- Applicant: Robert J. Calvet , Roman C. Gutierrez , Darrell Harrington , Tony K. Tang
- Applicant Address: US CA Arcadia
- Assignee: Siimpel Corporation
- Current Assignee: Siimpel Corporation
- Current Assignee Address: US CA Arcadia
- Agency: Haynes & Boone, LLP.
- Main IPC: H02N1/00
- IPC: H02N1/00
Abstract:
In accordance with an embodiment of the present invention, an electrostatic actuator has a base having a plurality of base pillars formed thereon and has a stage having a plurality of stage pillars formed thereon. The controlled application of voltage signals to the base pillars and/or the stage pillars results in electrostatic force that effects movement of the stage with respect to the base.
Public/Granted literature
- US20070024155A1 MEMS digital linear actuator Public/Granted day:2007-02-01
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