发明授权
US07583453B2 Optical element holding structure, exposure apparatus, and device manufacturing method 失效
光学元件保持结构,曝光装置和元件制造方法

  • 专利标题: Optical element holding structure, exposure apparatus, and device manufacturing method
  • 专利标题(中): 光学元件保持结构,曝光装置和元件制造方法
  • 申请号: US12129825
    申请日: 2008-05-30
  • 公开(公告)号: US07583453B2
    公开(公告)日: 2009-09-01
  • 发明人: Setsuo Yoshida
  • 申请人: Setsuo Yoshida
  • 申请人地址: JP Tokyo
  • 专利权人: Canon Kabushiki Kaisha
  • 当前专利权人: Canon Kabushiki Kaisha
  • 当前专利权人地址: JP Tokyo
  • 代理机构: Canon U.S.A., Inc., IP Division
  • 优先权: JP2007-155726 20070612
  • 主分类号: G02B7/02
  • IPC分类号: G02B7/02
Optical element holding structure, exposure apparatus, and device manufacturing method
摘要:
An optical element holding structure comprises a first holding member holding an optical element, a second holding member holding the first holding member, a third holding member holding the second holding member, first elastic members positioned between the first and second holding members and can elastically deform in the radial direction and second elastic members positioned between the second and third holding members in a radial direction thereof and can elastically deform in the radial direction, the plurality of first elastic members and the plurality of second elastic members are arranged in a circumferential direction about an optical axis of the optical element as the center, and a phase of the plurality of first elastic members is shifted from a phase of the plurality of second elastic members in the circumferential direction about the optical axis of the optical element as the center.
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