发明授权
- 专利标题: Optical element holding structure, exposure apparatus, and device manufacturing method
- 专利标题(中): 光学元件保持结构,曝光装置和元件制造方法
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申请号: US12129825申请日: 2008-05-30
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公开(公告)号: US07583453B2公开(公告)日: 2009-09-01
- 发明人: Setsuo Yoshida
- 申请人: Setsuo Yoshida
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon U.S.A., Inc., IP Division
- 优先权: JP2007-155726 20070612
- 主分类号: G02B7/02
- IPC分类号: G02B7/02
摘要:
An optical element holding structure comprises a first holding member holding an optical element, a second holding member holding the first holding member, a third holding member holding the second holding member, first elastic members positioned between the first and second holding members and can elastically deform in the radial direction and second elastic members positioned between the second and third holding members in a radial direction thereof and can elastically deform in the radial direction, the plurality of first elastic members and the plurality of second elastic members are arranged in a circumferential direction about an optical axis of the optical element as the center, and a phase of the plurality of first elastic members is shifted from a phase of the plurality of second elastic members in the circumferential direction about the optical axis of the optical element as the center.
公开/授权文献
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |