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US07584649B2 Sensor with microelectro-mechanical oscillators 有权
传感器与微电子机械振荡器

Sensor with microelectro-mechanical oscillators
摘要:
A sensor is provided which is configured to detect the presence of multiple analytes, for example chemical or biological compounds, through the measurement of induced resonance shifts in a coupled array of microelectromechanical or micromechanical resonators.
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