发明授权
- 专利标题： Micro-electro mechanical systems switch and method of fabricating the same
- 专利标题（中）： 微机电系统开关及其制造方法
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申请号： US11440863申请日： 2006-05-24
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公开(公告)号： US07585113B2公开(公告)日： 2009-09-08
- 发明人: Jae Woo Lee , Chang Han Je , Sung Weon Kang
- 申请人： Jae Woo Lee , Chang Han Je , Sung Weon Kang
- 申请人地址： KR Daejeon
- 专利权人： Electronics and Telecommunications Research Institute
- 当前专利权人： Electronics and Telecommunications Research Institute
- 当前专利权人地址： KR Daejeon
- 代理机构： Blakely, Sokoloff, Taylor & Zafman LLP
- 优先权： KR10-2005-0120187 20051208
- 主分类号： G02B6/00
- IPC分类号： G02B6/00
摘要：
A MEMS switch and a method of manufacturing the same are disclosed. The MEMS switch includes: a substrate including a trench, a ground line and a signal line having an opened portion; a moving plate separated from the substrate at a predetermined space and including a contact member for connecting an electrode plate and the opened portion and having a deep corrugate to insert the trench; and a supporting member for supporting the moving plate. Such a MEMS switch prevents the thermal expansion and the stiction problem.
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