Invention Grant
- Patent Title: Micro-electro mechanical systems switch and method of fabricating the same
- Patent Title (中): 微机电系统开关及其制造方法
-
Application No.: US11440863Application Date: 2006-05-24
-
Publication No.: US07585113B2Publication Date: 2009-09-08
- Inventor: Jae Woo Lee , Chang Han Je , Sung Weon Kang
- Applicant: Jae Woo Lee , Chang Han Je , Sung Weon Kang
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Priority: KR10-2005-0120187 20051208
- Main IPC: G02B6/00
- IPC: G02B6/00
Abstract:
A MEMS switch and a method of manufacturing the same are disclosed. The MEMS switch includes: a substrate including a trench, a ground line and a signal line having an opened portion; a moving plate separated from the substrate at a predetermined space and including a contact member for connecting an electrode plate and the opened portion and having a deep corrugate to insert the trench; and a supporting member for supporting the moving plate. Such a MEMS switch prevents the thermal expansion and the stiction problem.
Public/Granted literature
- US20070170460A1 Micro-electro mechanical systems switch and method of fabricating the same Public/Granted day:2007-07-26
Information query
