发明授权
- 专利标题： Moving apparatus, exposure apparatus, and device manufacturing method
- 专利标题（中）： 移动装置，曝光装置和装置制造方法
-
申请号： US11947024申请日： 2007-11-29
-
公开(公告)号： US07586218B2公开(公告)日： 2009-09-08
- 发明人: Hiroyuki Koide
- 申请人： Hiroyuki Koide
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： Fitzpatrick, Cella, Harper & Scinto
- 优先权： JP2002-295014 20021008
- 主分类号： H02K41/00
- IPC分类号： H02K41/00
摘要：
A moving apparatus including a movable portion which is supported so as to move in a first direction, a first actuator having a movable element and a stator, the movable element being connected to the movable portion, a reference structure which has a guide surface parallel to the first direction and which supports the stator in the first direction, a second actuator configured to drive the stator in a rotation direction around an axis which is perpendicular to the guide surface, and a control unit configured to control the second actuator so as to suppress the rotation of the stator accompanied by the movement of the movable portion.
公开/授权文献
信息查询
