Invention Grant
US07589242B2 Use of highly purified hydrocarbons in vacuum ultraviolet applications
失效
在真空紫外线应用中使用高度纯化的碳氢化合物
- Patent Title: Use of highly purified hydrocarbons in vacuum ultraviolet applications
- Patent Title (中): 在真空紫外线应用中使用高度纯化的碳氢化合物
-
Application No.: US11141285Application Date: 2005-09-14
-
Publication No.: US07589242B2Publication Date: 2009-09-15
- Inventor: Roger Harquail French , Sheng Peng , Robert Clayton Wheland
- Applicant: Roger Harquail French , Sheng Peng , Robert Clayton Wheland
- Applicant Address: US DE Wilmington
- Assignee: E. I. du Pont de Nemours and Company
- Current Assignee: E. I. du Pont de Nemours and Company
- Current Assignee Address: US DE Wilmington
- Agent Gail D. Tanzer
- Main IPC: C10M105/02
- IPC: C10M105/02 ; G03C1/00
Abstract:
The present invention is drawn to the use of alkanes that are highly transparent to UV wavelengths ranging from about 170 nm to 260 nm in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography, particularly at 193 and 248 nm exposure wavelength.
Public/Granted literature
- US20050286031A1 Use of highly purified hydrocarbons in vacuum ultraviolet applications Public/Granted day:2005-12-29
Information query
