发明授权
- 专利标题: Applicator device
- 专利标题(中): 施放器装置
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申请号: US11387865申请日: 2006-03-24
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公开(公告)号: US07591899B2公开(公告)日: 2009-09-22
- 发明人: Junichi Uehara , Takashi Iwade
- 申请人: Junichi Uehara , Takashi Iwade
- 申请人地址: JP Tokyo
- 专利权人: Toray Engineering Co., Ltd.
- 当前专利权人: Toray Engineering Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Global IP Counselors, LLP
- 优先权: JP2005-104393 20050331
- 主分类号: B05C5/00
- IPC分类号: B05C5/00 ; B05B13/02 ; B05B7/12
摘要:
An applicator device comprises a reservoir tank trapping embrocation, a stage holding a substrate, a ferrule having a slit-shaped opening section above the stage, a fluid transfer pump guiding the embrocation within the reservoir tank to the ferrule, a first opening and closing valve between a suction opening of the fluid transfer pump and the reservoir tank, opening when a suction operation is carried out and closing when a discharge operation is carried out, a second opening and closing valve between a discharge opening of the fluid transfer pump and the ferrule, opening when a discharge operation is carried out and closing when a suction operation is carried out, and driving means relatively moving the ferrule and/or substrate when the slit-shaped opening section and the substrate are adjacent to one another, wherein the fluid transfer pump comprises a membranous sealing member sealing a gap between a cylinder and a plunger.
公开/授权文献
- US20060219166A1 Applicator device 公开/授权日:2006-10-05