发明授权
US07596162B2 Method for forming a coating film on a facet of a semiconductor laser diode 有权
在半导体激光二极管的面上形成涂膜的方法

Method for forming a coating film on a facet of a semiconductor laser diode
摘要:
The present invention is to provide a method for producing a semiconductor laser diode (LD) with an enhanced ESD resistance. The method includes a step for forming an aluminum film on a facet of the LD and a step for forming an aluminum oxide film on the aluminum film. The underlying aluminum film is oxidized during the formation of the aluminum oxide film to form a double aluminum oxide layer. The ratio of the oxide composition of the underlying aluminum oxide film is smaller than that of the upper aluminum oxide film.
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