发明授权
US07596163B2 VCSEL, manufacturing method thereof, module, light sending device, optical spatial transmission device, light sending system, and optical spatial transmission system
有权
VCSEL及其制造方法,模块,发光装置,光学空间传输装置,发光系统和光学空间传输系统
- 专利标题: VCSEL, manufacturing method thereof, module, light sending device, optical spatial transmission device, light sending system, and optical spatial transmission system
- 专利标题(中): VCSEL及其制造方法,模块,发光装置,光学空间传输装置,发光系统和光学空间传输系统
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申请号: US11803468申请日: 2007-05-15
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公开(公告)号: US07596163B2公开(公告)日: 2009-09-29
- 发明人: Masahiro Yoshikawa , Masateru Yamamoto , Takashi Kondo
- 申请人: Masahiro Yoshikawa , Masateru Yamamoto , Takashi Kondo
- 申请人地址: JP Tokyo
- 专利权人: Fuji Xerox Co., Ltd.
- 当前专利权人: Fuji Xerox Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Fildes & Outland, P.C.
- 优先权: JP2006-235681 20060831
- 主分类号: H01S5/00
- IPC分类号: H01S5/00
摘要:
A VCSEL includes a substrate, a first semiconductor multilayer of a first conductivity-type, an active layer, a second semiconductor multilayer of a second conductivity-type, a contact layer, each of the layers stacked on the substrate. The second semiconductor multilayer constitutes a resonator together with the active layer and the first semiconductor multilayer. A metal layer is formed on the contact layer. The metal layer includes an opening portion that defines a region that emits laser light. When oscillation wavelength of the laser light is λ, optical thickness T of the contact layer and a top layer of the second semiconductor multilayer that contacts with the contact layer is smaller than λ/4.