Invention Grant
- Patent Title: Ion source and metals used in making components thereof and method of making same
- Patent Title (中): 用于制造组分的离子源和金属及其制备方法
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Application No.: US11523089Application Date: 2006-09-19
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Publication No.: US07598500B2Publication Date: 2009-10-06
- Inventor: Nestor P. Murphy , David E. Rock , Hugh A. Walton , Maximo Frati
- Applicant: Nestor P. Murphy , David E. Rock , Hugh A. Walton , Maximo Frati
- Applicant Address: US MI Auburn Hills
- Assignee: Guardian Industries Corp.
- Current Assignee: Guardian Industries Corp.
- Current Assignee Address: US MI Auburn Hills
- Agency: Nixon & Vanderhye P.C.
- Main IPC: H01J27/14
- IPC: H01J27/14

Abstract:
An ion source is capable of generating and/or emitting an ion beam which may be used to deposit a layer on a substrate or to perform other functions. In certain example embodiments, techniques for reducing the costs associated with producing ion sources and/or elements thereof are provided. Such techniques may include, for example, forming the inner and/or outer cathode(s) from 1018 mild steel and/or segmented pieces. Such techniques also or instead include, for example, forming the ion source body from a single steel U-channel, or from segmented pieces making up the same. These techniques may be used alone or in various combinations.
Public/Granted literature
- US20080067400A1 Ion source and metals used in making components thereof and method of making same Public/Granted day:2008-03-20
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