Invention Grant
US07598500B2 Ion source and metals used in making components thereof and method of making same 失效
用于制造组分的离子源和金属及其制备方法

Ion source and metals used in making components thereof and method of making same
Abstract:
An ion source is capable of generating and/or emitting an ion beam which may be used to deposit a layer on a substrate or to perform other functions. In certain example embodiments, techniques for reducing the costs associated with producing ion sources and/or elements thereof are provided. Such techniques may include, for example, forming the inner and/or outer cathode(s) from 1018 mild steel and/or segmented pieces. Such techniques also or instead include, for example, forming the ion source body from a single steel U-channel, or from segmented pieces making up the same. These techniques may be used alone or in various combinations.
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