发明授权
US07598825B2 Flap resonator, method of manufacturing a flap resonator, and integrated circuit including the flap resonator
有权
翼片谐振器，制造翼片谐振器的方法以及包括翼片谐振器的集成电路
- 专利标题： Flap resonator, method of manufacturing a flap resonator, and integrated circuit including the flap resonator
- 专利标题（中）： 翼片谐振器，制造翼片谐振器的方法以及包括翼片谐振器的集成电路
-
申请号： US11582947申请日： 2006-10-17
-
公开(公告)号： US07598825B2公开(公告)日： 2009-10-06
- 发明人: Kazuaki Tanaka
- 申请人： Kazuaki Tanaka
- 申请人地址： JP
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 当前专利权人地址： JP
- 代理机构： Harness, Dickey & Pierce, P.L.C.
- 优先权： EP05022647 20051018
- 主分类号： H03H9/02
- IPC分类号： H03H9/02 ; H01L29/40
摘要：
Flap resonator, comprising a first electrode and a second electrode, the second electrode comprising a support part separated from an adjacent end of the first electrode by a dielectric part, and a beam part extending from said support part and over at least a part of a surface of the first electrode. The support part has an effective width that is smaller than the width of the beam part.
公开/授权文献
信息查询
