发明授权
- 专利标题： Leak detector comprising an inlet
- 专利标题（中）： 泄漏检测器包括入口
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申请号： US10542817申请日： 2004-01-13
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公开(公告)号： US07600989B2公开(公告)日： 2009-10-13
- 发明人: Thomas Böhm
- 申请人： Thomas Böhm
- 申请人地址： DE
- 专利权人： Inficon GmbH
- 当前专利权人： Inficon GmbH
- 当前专利权人地址： DE
- 代理机构： Mariama Muldoon Blasiak & Sullivan LLP
- 优先权： DE10302987 20030125
- 国际申请： PCT/EP2004/000161 WO 20040113
- 国际公布： WO2004/068099 WO 20040812
- 主分类号： F04B35/04
- IPC分类号： F04B35/04 ; G01M3/04
摘要：
A leak detector includes an inlet, a high-vacuum pump, and a test gas detector, which is connected to the entry of the high-vacuum pump. A backing pump is connected to an outlet area of the high-vacuum pump, and a test gas line extends between the inlet of the leak detector and the backing pump, the test gas line being connected to the outlet area of the high-vacuum pump via a line section. In order to shorten the response time of the leak detector, the line and the backing pump are connected via separate connections to the outlet area of the high-vacuum pump.
公开/授权文献
- US20060034702A1 Leak detector comprising an inlet 公开/授权日：2006-02-16
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