发明授权
- 专利标题: Method for manufacturing optical device
- 专利标题(中): 光学元件制造方法
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申请号: US11489670申请日: 2006-07-20
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公开(公告)号: US07601551B2公开(公告)日: 2009-10-13
- 发明人: Yukihiro Takeuchi , Junji Oohara
- 申请人: Yukihiro Takeuchi , Junji Oohara
- 申请人地址: JP Kariya
- 专利权人: DENSO CORPORATION
- 当前专利权人: DENSO CORPORATION
- 当前专利权人地址: JP Kariya
- 代理机构: Posz Law Group, PLC
- 优先权: JP2005-261578 20050909
- 主分类号: H01L21/66
- IPC分类号: H01L21/66
摘要:
A method for manufacturing an optical device having an optical block, through which a light is transmitted, is provided. The method includes steps of: forming a plurality of silicon oxide members, which is disposed on a silicon substrate, wherein the silicon oxide members are arranged in parallel each other by a predetermined clearance between two adjacent silicon oxide members; and pouring a super critical fluid into the clearance so that the clearance is filled with a product formed from a predetermined compound for forming the optical block, wherein the predetermined compound is dissolved in the super critical fluid.
公开/授权文献
- US20070059856A1 Method for manufacturing optical device 公开/授权日:2007-03-15