发明授权
- 专利标题: Work function control of metals
- 专利标题(中): 金属工作功能控制
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申请号: US11870631申请日: 2007-10-11
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公开(公告)号: US07601577B2公开(公告)日: 2009-10-13
- 发明人: James Joseph Chambers , Mark Robert Visokay , Luigi Colombo , Antonio Luis Pacheco Rotondaro
- 申请人: James Joseph Chambers , Mark Robert Visokay , Luigi Colombo , Antonio Luis Pacheco Rotondaro
- 申请人地址: US TX Dallas
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 当前专利权人地址: US TX Dallas
- 代理商 Jacqueline J. Garner; Wade J. Brady, III; Frederick J. Telecky, Jr.
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L21/8234 ; H01L21/8238 ; H01L21/4763 ; H01L21/3205
摘要:
Forming metal gate transistors that have different work functions is disclosed. In one example, a first metal, which is a ‘mid gap’ metal, is manipulated in first and second regions by second and third metals, respectively, to move the work function of the first metal in opposite directions in the different regions. The resulting work functions in the different regions correspond to that of different types of the transistors that are to be formed.
公开/授权文献
- US20080044957A1 WORK FUNCTION CONTROL OF METALS 公开/授权日:2008-02-21
信息查询
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