发明授权
US07604903B1 Mask having sidewall absorbers to enable the printing of finer features in nanoprint lithography (1XMASK)
有权
具有侧壁吸收器的面罩能够在纳米印刷光刻(1XMASK)中印刷更精细的特征,
- 专利标题: Mask having sidewall absorbers to enable the printing of finer features in nanoprint lithography (1XMASK)
- 专利标题(中): 具有侧壁吸收器的面罩能够在纳米印刷光刻(1XMASK)中印刷更精细的特征,
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申请号: US10768515申请日: 2004-01-30
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公开(公告)号: US07604903B1公开(公告)日: 2009-10-20
- 发明人: Bhanwar Singh , Srikanteswara Dakshina-Murthy , Khoi A. Phan , Bharath Rangarajan , Ramkumar Subramanian
- 申请人: Bhanwar Singh , Srikanteswara Dakshina-Murthy , Khoi A. Phan , Bharath Rangarajan , Ramkumar Subramanian
- 申请人地址: US CA Sunnyvale
- 专利权人: Advanced Micro Devices, Inc.
- 当前专利权人: Advanced Micro Devices, Inc.
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: Turocy & Watson, LLP
- 主分类号: G03F1/00
- IPC分类号: G03F1/00 ; G03F1/14
摘要:
A mask is provided to be used with nanoprint lithography processes to facilitate reproduction of small features required for the production of integrated circuits. A translucent substrate is provided along with one or more three-dimensional features that include one or more vertical sidewalls. An absorbing material is deposited upon one or more of the vertical sidewalls so that light in an incident direction to an upper surface of the substrate will be absorbed by the absorbing material, resulting in light blocking features. One or more horizontal surfaces are formed upon one or more of the three-dimensional features, which allow light rays to exit a lower surface of the substrate unobstructed by the absorbing material.
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