Invention Grant
- Patent Title: On-chip reflectron and ion optics
- Patent Title (中): 片上反射镜和离子光学器件
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Application No.: US11550241Application Date: 2006-10-17
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Publication No.: US07605377B2Publication Date: 2009-10-20
- Inventor: Guido Fridolin Verbeck, IV , Kenneth Tsui
- Applicant: Guido Fridolin Verbeck, IV , Kenneth Tsui
- Applicant Address: US TX Richardson
- Assignee: Zyvex Corporation
- Current Assignee: Zyvex Corporation
- Current Assignee Address: US TX Richardson
- Agency: Haynes and Boone LLP
- Main IPC: H01J3/14
- IPC: H01J3/14 ; H01J23/04 ; H01J9/00 ; G09G1/04

Abstract:
A microelectronics apparatus comprising a substrate, a pair of grid electrodes coupled to the substrate on opposing sides of a central axis, wherein the grid electrodes are substantially parallel to each other and extend substantially perpendicular from the substrate, and a plurality of ion reflection lenses each coupled to the substrate, wherein each ion reflection lens: (1) is substantially perpendicular to each of the grid electrodes; (2) extends substantially perpendicular from the substrate; and (3) has an aperture aligned with the central axis.
Public/Granted literature
- US20080087841A1 ON-CHIP REFLECTRON AND ION OPTICS Public/Granted day:2008-04-17
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