Invention Grant
- Patent Title: Carbon electrode for generation of nitrogen trifluoride gas
- Patent Title (中): 用于产生三氟化氮气体的碳电极
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Application No.: US11572938Application Date: 2005-08-03
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Publication No.: US07608235B2Publication Date: 2009-10-27
- Inventor: Akimasa Tasaka , Masashi Kodama , Udai Tanaka , Hitoshi Takebayashi , Tetsuro Tojo , Atsuhisa Mimoto
- Applicant: Akimasa Tasaka , Masashi Kodama , Udai Tanaka , Hitoshi Takebayashi , Tetsuro Tojo , Atsuhisa Mimoto
- Applicant Address: JP Osaka-shi JP Tokyo
- Assignee: Toyo Tanso Co., Ltd.,Mitsui Chemicals, Inc.
- Current Assignee: Toyo Tanso Co., Ltd.,Mitsui Chemicals, Inc.
- Current Assignee Address: JP Osaka-shi JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2004-229326 20040805
- International Application: PCT/JP2005/014197 WO 20050803
- International Announcement: WO2006/013888 WO 20060209
- Main IPC: C01B21/088
- IPC: C01B21/088 ; C25B1/24 ; C25B1/00
Abstract:
A carbon electrode for producing gaseous nitrogen trifluoride comprising a dense texture with an average pore size of 0.5 μm or less is provided. The carbon electrode contains a carbonaceous material, and 3 to 10 wt % of at least one selected from magnesium fluoride and aluminum fluoride which have a melting point not lower than the baking temperature of the carbonaceous material.
Public/Granted literature
- US20070199828A1 Carbon Electrode For Generation Of Nitrogen Trifluoride Gas Public/Granted day:2007-08-30
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